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Sapphire substrates for large-area 2D transition metal dichalcogenides synthesis: A brief review

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Title
Sapphire substrates for large-area 2D transition metal dichalcogenides synthesis: A brief review
Author(s)
Krishna, Swathi; Soo Ho Choi; Kim, Soo Min; Ki Kang Kim
Publication Date
2024-03
Journal
Current Applied Physics, v.59, pp.208 - 213
Publisher
The Korean Physical Society
Abstract
Two-dimensional transition metal dichalcogenides (TMDs) have attracted significant attention owing to their unique physical properties, such as strong spin-orbit coupling, giant magnetoresistance, and high carrier mobility. To study their fundamentals and develop high-performance electronic devices, high-quality large-area TMD films are inevitably required. Recently, sapphire substrate has emerged as a promising wafer-scale growth platform for synthesizing TMDs via chemical vapor deposition. In this brief review, we address the synthesis of both polycrystalline and single-crystalline TMDs on c-plane and miscut sapphire substrates. In addition, post-treatment processes are investigated, including H2-treatement and oxidation, to achieve a well-defined surface structure and enhance the reproducibility of single-crystalline TMD synthesis. We conclude by offering a summary and insights into future research directions. © 2023
URI
https://pr.ibs.re.kr/handle/8788114/14894
DOI
10.1016/j.cap.2023.11.016
ISSN
1567-1739
Appears in Collections:
Center for Integrated Nanostructure Physics(나노구조물리 연구단) > 1. Journal Papers (저널논문)
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