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Selective patterning of out-of-plane piezoelectricity in MoTe2 via focused ion beam

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Title
Selective patterning of out-of-plane piezoelectricity in MoTe2 via focused ion beam
Author(s)
Daehee Seol; Songkil Kim; Woo-Sung Jang; Yeongrok Jin; Seunghun Kang; Sera Kim; Dongyeun Won; Chanwoo Lee; Young-Min Kim; Jaekwang Lee; Heejun Yang; Mun Seok Jeong; Alex Belianinov; Alexander Tselev; Suhas Somnath; Christopher R. Smith; Olga S. Ovchinnikova; Nina Balke; Yunseok Kim
Publication Date
2021-01
Journal
NANO ENERGY, v.79
Publisher
ELSEVIER SCIENCE BV
Abstract
© 2020 Elsevier Ltd. Two-dimensional transition-metal dichalcogenides (TMDs) have a strain-sensitive nature and can only exhibit in-plane piezoelectricity, owing to their in-plane inversion symmetry breaking, which limits their practical applications for vertical stimulations. In this study, we demonstrated the capability of focused ion beams to create out-of-plane piezoelectricity on multi-layered MoTe2. We utilized a focused helium ion beam to selectively pattern the out-of-plane piezoelectricity via defect engineering in a layered MoTe2 flake. The generated out-of-plane piezoelectricity in the desired area was quantitatively examined using atomic force microscopy, and ion beam irradiation-induced defect formation that gave rise to inversion symmetry breaking was confirmed. These results indicated that the out-of-plane piezoelectricity can be selectively patterned through a focused helium ion beam, and it is expected that this approach can also be applied to other classes of TMDs and can expand the application fields of TMD-based devices
URI
https://pr.ibs.re.kr/handle/8788114/9512
DOI
10.1016/j.nanoen.2020.105451
ISSN
2211-2855
Appears in Collections:
Center for Integrated Nanostructure Physics(나노구조물리 연구단) > 1. Journal Papers (저널논문)
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