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Growth phase diagram of graphene grown through chemical vapor deposition on copper

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Title
Growth phase diagram of graphene grown through chemical vapor deposition on copper
Author(s)
Qinke Wu; Sangjun Jeon; Young Jae Song
Subject
chemical vapor deposition, ; graphene growth, ; Growth phase diagram, ; multilayer graphene
Publication Date
2020-10
Journal
NANO, v.15, no.10, pp.2050137
Publisher
WORLD SCIENTIFIC PUBL CO PTE LTD
Abstract
© 2020 The Author(s).The phase diagram for graphene growth was obtained to understand the physics of the growth mechanism and control the layer number or coverage of graphene deposited on copper via low-pressure chemical vapor deposition (LPCVD). Management of the number of graphene layers and vacancies is essential for producing defect-free monolayer graphene and engineering multilayered functionalized graphene. In this work, the effects of the CH4 and H2 flow rates were investigated to establish the phase diagram for graphene growth. Using this phase diagram, we selectively obtained fully covered and partially grown monolayer graphene, graphene islands through Volmer-Weber growth, and multilayer graphene through Stranski-Krastanov-like growth. The layer numbers and coverage were determined using optical microscopy, scanning electron microscopy, transmission electron microscopy, atomic force microscopy and Raman spectroscopy. The growth modes were determined by the competition between catalytic growth with CH4 and catalytic etching with H2 on the copper surface during CVD growth. Intriguingly, this phase diagram showed that multilayer graphene flakes can be grown via LPCVD even with low CH4 and H2 flows
URI
https://pr.ibs.re.kr/handle/8788114/8458
DOI
10.1142/S1793292020501374
ISSN
1793-2920
Appears in Collections:
Center for Integrated Nanostructure Physics(나노구조물리 연구단) > 1. Journal Papers (저널논문)
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