A review of molecular beam epitaxy of ferroelectric BaTiO3 films on Si, Ge and GaAs substrates and their applications

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Title
A review of molecular beam epitaxy of ferroelectric BaTiO3 films on Si, Ge and GaAs substrates and their applications
Author(s)
Mazet, L; Sang Mo Yang; Kalinin, SV; Schamm-Chardon, S; Dubourdieu, C
Publication Date
2015-06
Journal
SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS, v.16, no.3, pp.036005 -
Publisher
IOP PUBLISHING LTD
Abstract
SrTiO3 epitaxial growth by molecular beam epitaxy (MBE) on silicon has opened up the route to the monolithic integration of various complex oxides on the complementary metal-oxide-semiconductor silicon platform. Among functional oxides, ferroelectric perovskite oxides offer promising perspectives to improve or add functionalities on-chip. We review the growth by MBE of the ferroelectric compound BaTiO3 on silicon (Si), germanium (Ge) and gallium arsenide (GaAs) and we discuss the film properties in terms of crystalline structure, microstructure and ferroelectricity. Finally, we review the last developments in two areas of interest for the applications of BaTiO3 films on silicon, namely integrated photonics, which benefits from the large Pockels effect of BaTiO3, and low power logic devices, which may benefit from the negative capacitance of the ferroelectric. © 2015 National Institute for Materials Science
URI
https://pr.ibs.re.kr/handle/8788114/1999
ISSN
1468-6996
Appears in Collections:
Center for Correlated Electron Systems(강상관계 물질 연구단) > Journal Papers (저널논문)
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