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나노 구조 물리 연구단
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Phase-Engineered Synthesis of Centimeter-Scale 1T′- and 2H-Molybdenum Ditelluride Thin Films

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Title
Phase-Engineered Synthesis of Centimeter-Scale 1T′- and 2H-Molybdenum Ditelluride Thin Films
Author(s)
Jin Cheol Park; Seok Joon Yun; Hyun Kim; Ji-Hoon Park; Sang Hoon Chae; Sung-Jin An; Jeong-Gyun Kim; Kim S.M.; Kim K.K.; Young Hee Lee
Publication Date
2015-06
Journal
ACS NANO, v.9, no.6, pp.6548 - 6554
Publisher
AMER CHEMICAL SOC
Abstract
We report the synthesis of centimeter-scale, uniform 1T′- and 2H-MoTe2 thin films via the tellurization of Mo thin films. 1T′-MoTe2 was initially grown and converted gradually to 2H-MoTe2 over a prolonged growth time under a Te atmosphere. Maintaining excessive Te was essential for obtaining the stable stoichiometric 2H-MoTe2 phase. Further annealing under a lower partial pressure of Te at the same temperature, followed by a rapid quenching, led to the reverse phase transition from 2H-MoTe2 to 1T′-MoTe2. The orientation of the 2H-MoTe2 film was determined by the tellurization rate. Slow tellurization was the key for obtaining a highly oriented 2H-MoTe2 film over the entire area, while fast tellurization led to a 2H-MoTe2 film with a randomly oriented c-axis. © 2015 American Chemical Society
URI
https://pr.ibs.re.kr/handle/8788114/1742
ISSN
1936-0851
Appears in Collections:
Center for Integrated Nanostructure Physics(나노구조물리 연구단) > Journal Papers (저널논문)
Files in This Item:
Phase-Engineered Synthesis of Centimeter-Scale 1T′- and 2H-Molybdenum Ditelluride Thin Films_ACS Nano.pdfDownload

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