Browsing centerfornanomaterialsandchemicalreactions나노물질및화학반응연구단 byKeyword : graphoepitaxy
Showing results 1 to 3 of 3
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Publication Date2014-07
Atomic layer deposition assisted pattern multiplicatino of block copolymer lithography for 5nm scale nanopatterning
Hyoung-Seok Moon; Ju Young Kim; Hyeong Min Jin, et al
ADVANCED FUNCTIONAL MATERIALS, v.24, no.27, pp.4343 - 4348
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Publication Date2014-09
Nanodomain Swelling Block Copolymer Lithography for Morphology Tunable Metal Nanopatterning
Jeong Ho Mun; Seung Keun Cha; Kim, Hyowook, et al
SMALL, v.10, no.18, pp.3742 - 3749
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Publication Date2014-10
Negative-Tone Block Copolymer Lithography by In Situ Surface Chemical Modification
Bong Hoon Kim; Byeon, KJ; Ju Young Kim, et al
SMALL, v.10, no.20, pp.4207 - 4212
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