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Is chemical vapor deposition of monolayer WSe2 comparable to other synthetic routes?

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Title
Is chemical vapor deposition of monolayer WSe2 comparable to other synthetic routes?
Author(s)
Soo Ho Choi; Yang, Sang-Hyeok; Sehwan Park; Byeong Wook Cho; Tuan Dung Nguyen; Kim, Jung Ho; Young-Min Kim; Ki Kang Kim; Young Hee Lee
Publication Date
2023-11
Journal
APL Materials, v.11, no.11
Publisher
American Institute of Physics Inc.
Abstract
Chemical vapor deposition (CVD) can produce wafer-scale transition-metal dichalcogenide (TMD) monolayers for the integration of electronic and optoelectronic devices. Nonetheless, the material quality of the CVD-grown TMDs still remains controversial. Here, we compare the quality of representative WSe2 monolayers grown by CVD compared to that obtained by other synthesis methods: bulk-grown-chemical vapor transport (CVT) and flux. Through the use of a deep-learning-based algorithm to analyze atomic-resolution scanning transmission electron microscopy images, we confirm that Se vacancies (VSe) are the primary defects in WSe2, with a defect density of ∼5.3 × 1013 cm−2 in the CVD-grown sample, within the same order of magnitude of other methods (∼3.9 × 1013 cm−2 from CVT-grown samples and ∼2.7 × 1013 cm−2 from flux-grown samples). The carrier concentration in field-effect transistors at room temperature is ∼5.84 × 1012 cm−2 from a CVD-grown sample, comparable to other methods (6-7 × 1012 cm−2). The field-effect mobility of the CVD-grown sample is slightly lower than that of other synthesis methods, together with similar trends in on-current. While the difference in photoluminescence intensity is not appreciable at room temperature, different intensities of defect-related localized states appear below 60 K. We conclude that the wafer-scale CVD-grown samples can be utilized without loss of generality in the integration of electronic/optoelectronic devices. © 2023 Author(s).
URI
https://pr.ibs.re.kr/handle/8788114/14483
DOI
10.1063/5.0175469
ISSN
2166-532X
Appears in Collections:
Center for Integrated Nanostructure Physics(나노구조물리 연구단) > 1. Journal Papers (저널논문)
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