BROWSE

Related Scientist

cmcm's photo.

cmcm
다차원탄소재료연구단
more info

ITEM VIEW & DOWNLOAD

Fabrication of p-type 2D single-crystalline transistor arrays with Fermi-level-tuned van der Waals semimetal electrodes

Cited 0 time in webofscience Cited 0 time in scopus
155 Viewed 0 Downloaded
Title
Fabrication of p-type 2D single-crystalline transistor arrays with Fermi-level-tuned van der Waals semimetal electrodes
Author(s)
Song, Seunguk; Aram Yoon; Jang, Sora; Lynch, Jason; Yang, Jihoon; Han, Juwon; Myeonggi Choe; Jin, Young Ho; Chen, Cindy Yueli; Cheon, Yeryun; Kwak, Jinsung; Jeong, Changwook; Cheong, Hyeonsik; Jariwala, Deep; Zonghoon Lee; Kwon, Soon-Yong
Publication Date
2023-08
Journal
Nature Communications, v.14, no.1
Publisher
NLM (Medline)
Abstract
High-performance p-type two-dimensional (2D) transistors are fundamental for 2D nanoelectronics. However, the lack of a reliable method for creating high-quality, large-scale p-type 2D semiconductors and a suitable metallization process represents important challenges that need to be addressed for future developments of the field. Here, we report the fabrication of scalable p-type 2D single-crystalline 2H-MoTe2 transistor arrays with Fermi-level-tuned 1T'-phase semimetal contact electrodes. By transforming polycrystalline 1T'-MoTe2 to 2H polymorph via abnormal grain growth, we fabricated 4-inch 2H-MoTe2 wafers with ultra-large single-crystalline domains and spatially-controlled single-crystalline arrays at a low temperature (~500 °C). Furthermore, we demonstrate on-chip transistors by lithographic patterning and layer-by-layer integration of 1T' semimetals and 2H semiconductors. Work function modulation of 1T'-MoTe2 electrodes was achieved by depositing 3D metal (Au) pads, resulting in minimal contact resistance (~0.7 kΩ·μm) and near-zero Schottky barrier height (~14 meV) of the junction interface, and leading to high on-state current (~7.8 μA/μm) and on/off current ratio (~105) in the 2H-MoTe2 transistors. © 2023. Springer Nature Limited.
URI
https://pr.ibs.re.kr/handle/8788114/13795
DOI
10.1038/s41467-023-40448-x
ISSN
2041-1723
Appears in Collections:
Center for Multidimensional Carbon Materials(다차원 탄소재료 연구단) > 1. Journal Papers (저널논문)
Files in This Item:
There are no files associated with this item.

qrcode

  • facebook

    twitter

  • Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
해당 아이템을 이메일로 공유하기 원하시면 인증을 거치시기 바랍니다.

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

Browse