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Publication Date2017-10 Advanced Silicon-on-Insulator: Crystalline Silicon on Atomic Layer Deposited Beryllium Oxide
Seung Min Lee; Jung Hwan Yum; Eric S. Larsen, et al
SCIENTIFIC REPORTS, v.7, pp.13205
Publication Date2017-12 Atomic-Layer Deposition of Single-Crystalline BeO Epitaxially Grown on GaN Substrates
Seung Min Lee; Jung Hwan Yum; Seonno Yoon, et al
ACS APPLIED MATERIALS & INTERFACES, v.9, no.48, pp.41973 - 41979
Publication Date2019-06 Domain epitaxy of crystalline BeO films on GaN and ZnO substrates
Seung Min Lee; Jung Hwan Yum; Eric S. Larsen, et al
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, v.102, no.6, pp.3745 - 3752
Publication Date2017-08 Growth and Characterization of BeO Thin Films Grown by Atomic Layer Deposition Using H2O and O-3 as Oxygen Sources
Woo Chul Lee; Cheol Jin Cho; Sangtae Kim, et al
JOURNAL OF PHYSICAL CHEMISTRY C, v.121, no.32, pp.17498 - 17504

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