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다차원 탄소재료 연구단
다차원 탄소재료 연구단
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Growth and Characterization of BeO Thin Films Grown by Atomic Layer Deposition Using H2O and O-3 as Oxygen Sources

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Title
Growth and Characterization of BeO Thin Films Grown by Atomic Layer Deposition Using H2O and O-3 as Oxygen Sources
Author(s)
Woo Chul Lee; Cheol Jin Cho; Sangtae Kim; Eric S. Larsen; Jung Hwan Yum; Christopher W. Bielawski; Cheol Seong Hwang; Seong Keun Kim
Publication Date
2017-08
Journal
Journal of Physical Chemistry C, v.121, no.32, pp.17498 - 17504
Publisher
AMER CHEMICAL SOC
Abstract
Growth characteristics and properties of BeO films grown by atomic layer deposition (ALD) are investigated. ALD chemistries between dimethylberyllium and two different oxygen sources, H2O and O-3, are governed by different reaction mechanisms, resulting in different film properties. At growth temperatures ranging from 150 to 300 degrees C, the properties of the BeO films grown using H2O are temperature-independent. In contrast, the BeO films grown using O-3 at low temperatures (<200 degrees C) show high concentrations of carbon and hydrogen, possibly owing to the incomplete removal of the ligands of the precursor, leading to a low film density. This correlates with the evolution of the rough surface and the microstructure composed of few nanometer-sized grains. The low-quality BeO films grown using O-3 at low temperatures (<200 degrees C) show a decreased band gap (E-g: 7.77.9 eV) and dielectric constant (epsilon(r): 5.66.7). Above 250 degrees C, these properties recovered to the levels (E-g similar to 9.4 eV and epsilon(r) similar to 8.1) of the BeO films grown using H2O, which show high values of E-g similar to 9.19.4 eV and epsilon(r) similar to 8. Collectively, these findings demonstrate that the O-3-ALD process requires relatively more thermal energy than H2O-ALD does, to produce high-quality BeO films. © 2017 American Chemical Society
URI
https://pr.ibs.re.kr/handle/8788114/3872
ISSN
1932-7447
Appears in Collections:
Center for Multidimensional Carbon Materials(다차원 탄소재료 연구단) > Journal Papers (저널논문)
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