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Wafer-scale production of patterned transition metal ditelluride layers for two-dimensional metal–semiconductor contacts at the Schottky–Mott limit

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Title
Wafer-scale production of patterned transition metal ditelluride layers for two-dimensional metal–semiconductor contacts at the Schottky–Mott limit
Author(s)
Seunguk Song; Yeoseon Sim; Se-Yang Kim; Jung Hwa Kim; Inseon Oh; Woongki Na; Do Hee Lee; Jaewon Wang; Shili Yan; Yinan Liu; Jinsung Kwak; Jian-Hao Chen; Hyeonsik Cheong; Jung-Woo Yoo; Zonghoon Lee; Soon-Yong Kwon
Subject
MOS2 TRANSISTORS, ; LARGE-AREA, ; RESISTANCE, ; GRAPHENE, ; PERFORMANCE, ; ELECTRODE, ; DEVICES, ; FILMS, ; WSE2
Publication Date
2020-04
Journal
Nature Electronics, v.3, no.4, pp.207 - 215
Publisher
Nature Research
Abstract
© 2020, The Author(s), under exclusive licence to Springer Nature Limited. A key challenge in the development of two-dimensional (2D) devices is the fabrication of metal–semiconductor junctions with minimal contact resistance and depinned energy levels. An ideal solution for practical applications is to make contacts between 2D van der Waals semiconductors and 2D van der Waals metals. Here we report the wafer-scale production of patterned layers of metallic transition metal ditellurides on different substrates. Our tungsten ditelluride and molybdenum ditelluride layers, which are grown using a tellurization process applied to a precursor transition metal layer, have an electronic performance comparable to that of mechanically exfoliated flakes and can be combined with the 2D semiconductor molybdenum disulfide. The resulting metal–semiconductor junctions are free from significant disorder effects and Fermi-level pinning, and are used to create monolayer molybdenum disulfide field-effect transistors. The Schottky barrier heights of the devices also largely follow the trend of the Schottky–Mott limit
URI
https://pr.ibs.re.kr/handle/8788114/8688
DOI
10.1038/s41928-020-0396-x
ISSN
2520-1131
Appears in Collections:
Center for Multidimensional Carbon Materials(다차원 탄소재료 연구단) > 1. Journal Papers (저널논문)
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