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원자제어 저차원 전자계 연구단
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Patternable large-scale molybdenium disulfide atomic layers grown by gold-assisted chemical vapor deposition

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Title
Patternable large-scale molybdenium disulfide atomic layers grown by gold-assisted chemical vapor deposition
Author(s)
Intek Song; Chibeom Park; Misun Hong; Baik J.; Shin H.-J.; Hee Cheul Choi
Publication Date
2014-01
Journal
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, v.53, no.5, pp.1266 - 1269
Publisher
WILEY-V C H VERLAG GMBH
Abstract
A novel way to grow MoS2 on a large scale with uniformity and in desired patterns is developed.We use Au film as a catalyst on which [Mo(CO)6] vapor decomposes to form a Mo-Au surface alloy that is an ideal Mo reservoir for the growth of atomic layers of MoS2. Upon exposure to H2S, this surface alloy transforms into a few layers of MoS2, which can be isolated and transferred on an arbitrary substrate. By simply patterning Au catalyst film by conventional lithographic techniques, MoS2 atomic layers in desired patterns can be fabricated. © 2014 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.
URI
https://pr.ibs.re.kr/handle/8788114/1543
ISSN
1433-7851
Appears in Collections:
Center for Artificial Low Dimensional Electronic Systems(원자제어 저차원 전자계 연구단) > Journal Papers (저널논문)
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