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Laser-Induced Phase Transition and Patterning of hBN-Encapsulated Mo Te-2

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Title
Laser-Induced Phase Transition and Patterning of hBN-Encapsulated Mo Te-2
Author(s)
Huije Ryu; Yunah Lee; Jae Hwan Jeong; Yangjin Lee; Yeryun Cheon; Kenji Watanabe; Takashi Taniguchi; Kwanpyo Kim; Hyeonsik Cheong; Chul-Ho Lee; Gwan-Hyoung Lee
Publication Date
2023-04
Journal
SMALL, v.19, no.17
Publisher
WILEY-V C H VERLAG GMBH
Abstract
Transition metal dichalcogenides exhibit phase transitions through atomic migration when triggered by various stimuli, such as strain, doping, and annealing. However, since atomically thin 2D materials are easily damaged and evaporated from these strategies, studies on the crystal structure and composition of transformed 2D phases are limited. Here, the phase and composition change behavior of laser-irradiated molybdenum ditelluride (MoTe2) in various stacked geometry are investigated, and the stable laser-induced phase patterning in hexagonal boron nitride (hBN)-encapsulated MoTe2 is demonstrated. When air-exposed or single-side passivated 2H-MoTe2 are irradiated by a laser, MoTe2 is transformed into Te or Mo3Te4 due to the highly accumulated heat and atomic evaporation. Conversely, hBN-encapsulated 2H-MoTe2 transformed into a 1T ' phase without evaporation or structural degradation, enabling stable phase transitions in desired regions. The laser-induced phase transition shows layer number dependence; thinner MoTe2 has a higher phase transition temperature. From the stable phase patterning method, the low contact resistivity of 1.13 k omega mu m in 2H-MoTe2 field-effect transistors with 1T ' contacts from the seamless heterophase junction geometry is achieved. This study paves an effective way to fabricate monolithic 2D electronic devices with laterally stitched phases and provides insights into phase and compositional changes in 2D materials.
URI
https://pr.ibs.re.kr/handle/8788114/13300
DOI
10.1002/smll.202205224
ISSN
1613-6810
Appears in Collections:
Center for Nanomedicine (나노의학 연구단) > 1. Journal Papers (저널논문)
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