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Selective Crystallization of Ferroelectric HfxZr1- xO2via Excimer Laser Annealing

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dc.contributor.authorSong, M.S.-
dc.contributor.authorPark, K.-
dc.contributor.authorLee, K.-
dc.contributor.authorCho, J.W.-
dc.contributor.authorLee, T.Y.-
dc.contributor.authorJungwon Park-
dc.contributor.authorChae, S.C.-
dc.date.accessioned2023-04-04T22:10:04Z-
dc.date.available2023-04-04T22:10:04Z-
dc.date.created2023-01-27-
dc.date.issued2023-01-
dc.identifier.issn2637-6113-
dc.identifier.urihttps://pr.ibs.re.kr/handle/8788114/13151-
dc.description.abstractHerein, we report the ferroelectricity of HfxZr1-xO2 (HZO) thin films crystallized via excimer laser annealing at 25 °C under atmospheric conditions. We characterized the structure and antiferroelectric/ferroelectric properties of HZO thin films using X-ray diffraction and standard polarization-voltage hysteresis. The laser-annealed Hf0.5Zr0.5O2 thin film was gradually crystallized with increasing laser pulse number. The HZO thin film series exhibited systemic changes in antiferroelectric/ferroelectric properties with variations in Zr concentration. In addition, we constructed a phase diagram of laser-annealed HZO thin films. © 2023 American Chemical Society.-
dc.language영어-
dc.publisherAmerican Chemical Society-
dc.titleSelective Crystallization of Ferroelectric HfxZr1- xO2via Excimer Laser Annealing-
dc.typeArticle-
dc.type.rimsART-
dc.identifier.wosid000914863600001-
dc.identifier.scopusid2-s2.0-85146133972-
dc.identifier.rimsid79763-
dc.contributor.affiliatedAuthorJungwon Park-
dc.identifier.doi10.1021/acsaelm.2c01555-
dc.identifier.bibliographicCitationACS Applied Electronic Materials, v.5, no.1, pp.117 - 122-
dc.relation.isPartOfACS Applied Electronic Materials-
dc.citation.titleACS Applied Electronic Materials-
dc.citation.volume5-
dc.citation.number1-
dc.citation.startPage117-
dc.citation.endPage122-
dc.type.docTypeArticle; Early Access-
dc.description.journalClass1-
dc.description.journalClass1-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaEngineering-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalWebOfScienceCategoryEngineering, Electrical & Electronic-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.subject.keywordPlusGROWTH-
dc.subject.keywordPlusFILMS-
dc.subject.keywordPlusZRO2-
dc.subject.keywordAuthorantiferroelectricity-
dc.subject.keywordAuthorcrystallization-
dc.subject.keywordAuthorexcimer laser annealing-
dc.subject.keywordAuthorferroelectricity-
dc.subject.keywordAuthorhafnium oxide-
dc.subject.keywordAuthorzirconium oxide-
Appears in Collections:
Center for Nanoparticle Research(나노입자 연구단) > 1. Journal Papers (저널논문)
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