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Atomic transistors based on seamless lateral metal-semiconductor junctions with a sub-1-nm transfer length

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Title
Atomic transistors based on seamless lateral metal-semiconductor junctions with a sub-1-nm transfer length
Author(s)
Song, Seunguk; Aram Yoon; Ha, Jong-Kwon; Yang, Jihoon; Jang, Sora; Leblanc, Chloe; Wang, Jaewon; Sim, Yeoseon; Jariwala, Deep; Seung Kyu Min; Zonghoon Lee; Kwon, Soon-Yong
Publication Date
2022-08
Journal
NATURE COMMUNICATIONS, v.13, no.1
Publisher
NATURE PORTFOLIO
Abstract
The edge-to-edge connected metal-semiconductor junction (MSJ) for two-dimensional (2D) transistors has the potential to reduce the contact length while improving the performance of the devices. However, typical 2D materials are thermally and chemically unstable, which impedes the reproducible achievement of high-quality edge contacts. Here we present a scalable synthetic strategy to fabricate low-resistance edge contacts to atomic transistors using a thermally stable 2D metal, PtTe2. The use of PtTe2 as an epitaxial template enables the lateral growth of monolayer MoS2 to achieve a PtTe2-MoS2 MSJ with the thinnest possible, seamless atomic interface. The synthesized lateral heterojunction enables the reduced dimensions of Schottky barriers and enhanced carrier injection compared to counterparts composed of a vertical 3D metal contact. Furthermore, facile position-selected growth of PtTe2-MoS2 MSJ arrays using conventional lithography can facilitate the design of device layouts with high processability, while providing low contact resistivity and ultrashort transfer length on wafer scales. Edge-to-edge metal-semiconductor junctions have the potential to improve the performance of 2D transistors. Here, the authors report a synthetic strategy to fabricate monolayer MoS2-PtTe2 heterojunction arrays with sub-1-nm transfer length and enhanced carrier injection compared to vertical 3D metallic contacts.
URI
https://pr.ibs.re.kr/handle/8788114/12332
DOI
10.1038/s41467-022-32582-9
ISSN
2041-1723
Appears in Collections:
Center for Multidimensional Carbon Materials(다차원 탄소재료 연구단) > 1. Journal Papers (저널논문)
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