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Wafer-Scale Production of Transition Metal Dichalcogenides and Alloy Monolayers by Nanocrystal Conversion for Large-Scale Ultrathin Flexible Electronics

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Title
Wafer-Scale Production of Transition Metal Dichalcogenides and Alloy Monolayers by Nanocrystal Conversion for Large-Scale Ultrathin Flexible Electronics
Author(s)
Jihoon Kim; Hyojin Seung; Dohun Kang; Joodeok Kim; Bae, Hyeonhu; Hayoung Park; Sungsu Kang; Changsoon Choi; Back Kyu Choi; Ji Soo Kim; Taeghwan Hyeon; Lee, Hoonkyung; Dae-Hyeong Kim; Shim, Sangdeok; Jungwon Park
Publication Date
2021-11-10
Journal
Nano Letters, v.21, no.21, pp.9153 - 9163
Publisher
American Chemical Society
Abstract
© 2021 American Chemical Society.Two-dimensional (2D) transition metal dichalcogenide (TMD) layers are unit-cell thick materials with tunable physical properties according to their size, morphology, and chemical composition. Their transition of lab-scale research to industrial-scale applications requires process development for the wafer-scale growth and scalable device fabrication. Herein, we report on a new type of atmospheric pressure chemical vapor deposition (APCVD) process that utilizes colloidal nanoparticles as process-scalable precursors for the wafer-scale production of TMD monolayers. Facile uniform distribution of nanoparticle precursors on the entire substrate leads to the wafer-scale uniform synthesis of TMD monolayers with the controlled size and morphology. Composition-controlled TMD alloy monolayers with tunable bandgaps can be produced by simply mixing dual nanoparticle precursor solutions in the desired ratio. We also demonstrate the fabrication of ultrathin field-effect transistors and flexible electronics with uniformly controlled performance by using TMD monolayers.
URI
https://pr.ibs.re.kr/handle/8788114/10859
DOI
10.1021/acs.nanolett.1c02991
ISSN
1530-6984
Appears in Collections:
Center for Nanoparticle Research(나노입자 연구단) > 1. Journal Papers (저널논문)
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