Microwave cavity perturbation of nitrogen doped nano-crystalline diamond films

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Title
Microwave cavity perturbation of nitrogen doped nano-crystalline diamond films
Author(s)
Jerome A. Cuenca; Kamatchi Jothiramalingam Sankaran; Paulius Pobedinskas; Kalpataru Panda; I-Nan Lin; Adrian Porch; Ken Haenen; Oliver A. Williams
Publication Date
2019-04
Journal
CARBON, v.145, no., pp.740 - 750
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
Abstract
Non-contact and non-destructive electrical conductivity measurements of nitrogen doped nano-crystalline diamond films have been demonstrated using a microwave cavity perturbation system. The conductivity of the films was controlled by simply varying the CH 4 gas concentration during microwave plasma assisted chemical vapour deposition, thereby promoting the formation of sp 2 carbon at the grain boundaries. The presence of sp 2 carbon is verified through Raman spectroscopy, x-ray photoelectron spectroscopy and electron energy loss spectroscopy, while scanning electron microscopy confirms an increasing surface area for sp 2 to form. The microwave cavity perturbation results show that the measured cavity quality factor varies with CH 4 concentration. The extraction of conductivity is achieved through a depolarisation model, which must be considered when the sample is smaller than the cavity and through both electric and magnetic field perturbations. The microwave measurements are comparable to contacting and damaging measurements when the film conductivity is greater than the substrate, thus demonstrating an invaluable method for determining conductivity without the need for depositing any electrodes on the film. © 2019 The Author
URI
https://pr.ibs.re.kr/handle/8788114/5648
ISSN
0008-6223
Appears in Collections:
Center for Nanomaterials and Chemical Reactions(나노물질 및 화학반응 연구단) > Journal Papers (저널논문)
Files in This Item:
Carbon 145 (2019) 740-750.pdfDownload

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