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High-Precision Temperature-Controllable Metal-Coated Polymeric Molds for Programmable, Hierarchical Patterning

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Title
High-Precision Temperature-Controllable Metal-Coated Polymeric Molds for Programmable, Hierarchical Patterning
Author(s)
Kwang Su Kim; Jong Uk Kim; Sori Lee; Ju Seung Lee; Young Jin Jo; Byeonghak Park; Hyowon Tak; Pil J. Yoo; Tae-il Kim
Publication Date
2017-10
Journal
ADVANCED FUNCTIONAL MATERIALS, v.27, no.38, pp.1702993 -
Publisher
WILEY-V C H VERLAG GMBH
Abstract
Nanofabrication is an indispensable process in nanoscience and nanotechnology. Unconventional lithographic techniques are often used for fabrication as alternatives to photolithography because they are faster, more cost-effective, and simpler to use. However, these techniques are limited in scalability and utility because of the collapse of preprinted structures during step-and-repeat processes. This study proposes a new class of temperaturecontrollable polymeric molds that are coated with a metal such that any site-specific patterning can be accomplished in a programmable manner using selective contact-dewetting lithography. The lithography allows sub100 nm patterning, step-and-repeat processing, and hierarchical structure fabrication. The programmable feature of the lithography can be utilized for the structural coloring and shaping of objects. Large-area programmable patterning, semiconductor device manufacturing, and the fabrication of iridescent security devices would benefit from the unique features of the proposed strategy. © 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
URI
https://pr.ibs.re.kr/handle/8788114/4070
ISSN
1616-301X
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Center for Neuroscience Imaging Research (뇌과학 이미징 연구단) > Journal Papers (저널논문)
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