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초강력 레이저 과학 연구단
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Structural transformations in femtosecond laser-processed n-type 4H-SiC

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Title
Structural transformations in femtosecond laser-processed n-type 4H-SiC
Author(s)
Zia U. Rehman; Karol Adam Janulewicz
Publication Date
2016-11
Journal
APPLIED SURFACE SCIENCE, v.385, no., pp.1 - 8
Publisher
ELSEVIER SCIENCE BV
Abstract
We present a comprehensive study of morphological modification induced on and below the surface of n-type 4H-SiC by irradiation with femtosecond laser pulses under tight focusing condition. Spectroscopic investigation of local electronic and structural transformations in SiC-micro/nanostructures suggested bond breaking i.e. transformation of crystalline SiC to amorphous silicon (a-Si) and amorphous carbon (a-C). These observations were augmented by investigations applying atomic force microscopy (AFM), micro-photoluminescence (PL) spectroscopy, and high resolution X-ray diffraction (HRXRD). A high-resolution cross-sectional study of laser-modified region with transmission electron microscope (TEM) showed a thin amorphous layer in the vicinity of the geometrical focus with deformations and stacking faults in the sub-surface area. Having considered the existing ablation theories, a complex interplay of fast laser heating followed by melting and rapid re-solidification as well as dynamic relaxation of the laser-induced stresses seems to be responsible for formation of the observed structural changes. © 2016 Elsevier B.V. All rights reserved
URI
https://pr.ibs.re.kr/handle/8788114/2528
ISSN
0169-4332
Appears in Collections:
Center for Relativistic Laser Science(초강력 레이저과학 연구단) > Journal Papers (저널논문)
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