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나노물질 및 화학반응 연구단
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Comparative Study of quaternary Mg and Group III element co-doped ZnO thin films with transparent conductive characteristics

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Title
Comparative Study of quaternary Mg and Group III element co-doped ZnO thin films with transparent conductive characteristics
Author(s)
In Young Kim; Seung Wook Shin; Myeng Gil Gang; Seung Hyoun Lee; K.V. Gurav; P.S.Patil; Jae Ho Yun; Jeong Yong Lee; Jin Hyeok Kim
Publication Date
2014-11
Journal
THIN SOLID FILMS, v.570, no.PB, pp.321 - 325
Publisher
ELSEVIER SCIENCE SA
Abstract
Mg and Ga co-doped ZnO (MgxGayZnzO, x+y+z=1, x= 0.05, y=0.02 and z= 0.93, MGZO), Mg and Al co-doped ZnO (MgxAlyZnzO, x + y + z = 1, x = 0.05, y = 0.02 and z = 0.93, MAZO), Mg and In co-doped ZnO (MgxInyZnzO, x+y+z=1, x= 0.05, y=0.02 and z= 0.93, MIZO), Mg doped ZnO (MgxZnyO, x+y=1, x =0.05 and y= 0.95,MZO) and pure ZnO thin films have been prepared on the glass substrates by RFmagnetron sputtering. Their structural, morphological, compositional, electrical, and optical properties were characterized. The X-ray diffraction patterns showed that all the thin filmswere grown as a hexagonal wurtzite phasewith c-axis preferred orientation without secondary phase. The (0002) peak positions ofMGZO, MAZO and MIZO thin films were not significantly changed. The cross-section field emission scanning electron microscopy images of MGZO, MAZO and MIZO thin films showed that all the thin films have a columnar structure with dense morphology. The MGZO thin film showed the best electrical characteristics in terms of the carrier concentration (3.7 × 1020/cm3), charge carrier mobility (8.39 cm2/Vs), and a lower resistivity (1.85 × 10−3 Ω cm). UV– visible spectroscopy studies showed that the MGZO, MAZO and MIZO thin films exhibit high transmittance over 85% in the visible region. The MGZO thin films showed wider optical band gap energy of 3.75 eV.
URI
https://pr.ibs.re.kr/handle/8788114/1444
ISSN
0040-6090
Appears in Collections:
Center for Nanomaterials and Chemical Reactions(나노물질 및 화학반응 연구단) > Journal Papers (저널논문)
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