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2D fin field-effect transistors integrated with epitaxial high-k gate oxideHighly Cited Paper

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Title
2D fin field-effect transistors integrated with epitaxial high-k gate oxide
Author(s)
Tan, Congwei; Yu, Mengshi; Tang, Junchuan; Gao, Xiaoyin; Yuling Yin; Zhang, Yichi; Wang, Jingyue; Gao, Xinyu; Zhang, Congcong; Zhou, Xuehan; Zheng, Liming; Liu, Hongtao; Jiang, Kaili; Feng Ding; Peng, Hailin
Publication Date
2023-03
Journal
Nature, v.616, no.7955, pp.66 - 72
Publisher
Nature Research
Abstract
Precise integration of two-dimensional (2D) semiconductors and high-dielectric-constant (k) gate oxides into three-dimensional (3D) vertical-architecture arrays holds promise for developing ultrascaled transistors1–5, but has proved challenging. Here we report the epitaxial synthesis of vertically aligned arrays of 2D fin-oxide heterostructures, a new class of 3D architecture in which high-mobility 2D semiconductor fin Bi2O2Se and single-crystal high-k gate oxide Bi2SeO5 are epitaxially integrated. These 2D fin-oxide epitaxial heterostructures have atomically flat interfaces and ultrathin fin thickness down to one unit cell (1.2 nm), achieving wafer-scale, site-specific and high-density growth of mono-oriented arrays. The as-fabricated 2D fin field-effect transistors (FinFETs) based on Bi2O2Se/Bi2SeO5 epitaxial heterostructures exhibit high electron mobility (μ) up to 270 cm2 V−1 s−1, ultralow off-state current (IOFF) down to about 1 pA μm−1, high on/off current ratios (ION/IOFF) up to 108 and high on-state current (ION) up to 830 μA μm−1 at 400-nm channel length, which meet the low-power specifications projected by the International Roadmap for Devices and Systems (IRDS)6. The 2D fin-oxide epitaxial heterostructures open up new avenues for the further extension of Moore’s law. © 2023, The Author(s), under exclusive licence to Springer Nature Limited.
URI
https://pr.ibs.re.kr/handle/8788114/13309
DOI
10.1038/s41586-023-05797-z
ISSN
0028-0836
Appears in Collections:
Center for Multidimensional Carbon Materials(다차원 탄소재료 연구단) > 1. Journal Papers (저널논문)
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