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다차원탄소재료연구단
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Multi-stage anisotropic etching of two-dimensional heterostructures (Apr, 10.1007/s12274-022-4193-x, 2022)

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dc.contributor.authorLi, Lin-
dc.contributor.authorJichen Dong-
dc.contributor.authorGeng, Dechao-
dc.contributor.authorLi, Menghan-
dc.contributor.authorFu, Wei-
dc.contributor.authorFeng Ding-
dc.contributor.authorHu, Wenping-
dc.contributor.authorYang, Hui Ying-
dc.date.accessioned2022-07-28T04:47:09Z-
dc.date.available2022-07-28T04:47:09Z-
dc.date.created2022-06-02-
dc.date.issued2022-07-
dc.identifier.issn1998-0124-
dc.identifier.urihttps://pr.ibs.re.kr/handle/8788114/11961-
dc.description.abstractRegarding the reverse process of materials growth, etching has been widely concerned to indirectly probe the growth kinetics, offering an avenue in governing the growth of two-dimensional (2D) materials. In this work, interface-driven anisotropic etching mode is demonstrated for the first time to be generally applied to 2D heterostructures. It is shown that the typical in-plane graphene and hexagonal boron nitride (h-BN) heterostructures follow a multi-stage etching behavior initiated first along the interfacial region between the two materials and then along edges of neighboring h-BN flakes and finally along central edges of h-BN. By accurately tuning etching conditions in the chemical vapor deposition process, series of etched 2D heterostructure patterns are controllably produced. Furthermore, scaled formation of graphene and h-BN heterostructures arrays has been realized with full assist of as-proposed etching mechanism, offering a direct top-down method to make 2D orientated heterostructures with order and complexity. Detection of interface-driven multi-staged anisotropic etching mode will shed light on understanding growth mechanism and further expanding wide applications of 2D heterostructures.-
dc.language영어-
dc.publisherTSINGHUA UNIV PRESS-
dc.titleMulti-stage anisotropic etching of two-dimensional heterostructures (Apr, 10.1007/s12274-022-4193-x, 2022)-
dc.typeArticle-
dc.type.rimsART-
dc.identifier.wosid000788936400001-
dc.identifier.scopusid2-s2.0-85136448079-
dc.identifier.rimsid78227-
dc.contributor.affiliatedAuthorJichen Dong-
dc.contributor.affiliatedAuthorFeng Ding-
dc.identifier.doi10.1007/s12274-022-4387-2-
dc.identifier.bibliographicCitationNANO RESEARCH, v.15, no.6, pp.4909 - 4915-
dc.relation.isPartOfNANO RESEARCH-
dc.citation.titleNANO RESEARCH-
dc.citation.volume15-
dc.citation.number6-
dc.citation.startPage4909-
dc.citation.endPage4915-
dc.type.docTypeCorrection-
dc.description.journalClass1-
dc.description.journalClass1-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaChemistry-
dc.relation.journalResearchAreaScience & Technology - Other Topics-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalResearchAreaPhysics-
dc.relation.journalWebOfScienceCategoryChemistry, Physical-
dc.relation.journalWebOfScienceCategoryNanoscience & Nanotechnology-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.subject.keywordAuthoranisotropic etching-
dc.subject.keywordAuthortwo-dimensional materials-
dc.subject.keywordAuthorheterostructures-
dc.subject.keywordAuthorgraphene-
dc.subject.keywordAuthorh-BN-
Appears in Collections:
Center for Multidimensional Carbon Materials(다차원 탄소재료 연구단) > 1. Journal Papers (저널논문)
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