BROWSE

Related Scientist

Lee, Kee Han's photo.

Lee, Kee Han
다차원 탄소재료 연구단
more info

ITEM VIEW & DOWNLOAD

CVD diamond growth: Replacing the hot metallic filament with a hot graphite plate

Cited 0 time in webofscience Cited 0 time in scopus
138 Viewed 0 Downloaded
Title
CVD diamond growth: Replacing the hot metallic filament with a hot graphite plate
Author(s)
Kee Han Lee; Won Kyung Seong; Rodney S. Ruoff
Publication Date
2022-02
Journal
Carbon, v.187, pp.396 - 403
Publisher
Elsevier Ltd
Abstract
© 2021 Elsevier LtdA diamond film was synthesized by chemical vapor deposition, where a hot graphite plate was used to thermally activate methane and hydrogen. The effect of parameters on the diamond films grown, such as pressure ranging from 40 to 100 torr, methane concentration in hydrogen varying from 0.5 to 2 vol %, and substrate temperatures from 1020 to 1140 °C, were studied. Diamond films with nanocrystalline to polycrystalline crystal sizes were obtained. A maximum growth rate of 0.8 μm/h was obtained, and the quality is comparable to diamond films synthesized by the hot metal filament chemical vapor deposition method. In contrast to the hot filament method, this method does not use a metallic filament as thermal activator. Therefore, the diamond films contain no metal contaminants and thus can be used for electronic and biomedical applications. The absence of metal contaminants was confirmed using different methods.
URI
https://pr.ibs.re.kr/handle/8788114/10932
DOI
10.1016/j.carbon.2021.11.032
ISSN
0008-6223
Appears in Collections:
Center for Multidimensional Carbon Materials(다차원 탄소재료 연구단) > 1. Journal Papers (저널논문)
Files in This Item:
There are no files associated with this item.

qrcode

  • facebook

    twitter

  • Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
해당 아이템을 이메일로 공유하기 원하시면 인증을 거치시기 바랍니다.

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

Browse