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A soft pressure sensor array based on a conducting nanomembrane

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Title
A soft pressure sensor array based on a conducting nanomembrane
Author(s)
Jung, Daekwang; Kang, Kyumin; Jung, Hyunjin; Seong, Duhwan; An, Soojung; Yoon, Jiyong; Kim, Wooseok; Mikyung Shin; Baac, Hyoung Won; Won, Sangmin; Shin, Changhwan; Donghee Son
Publication Date
2021-08
Journal
Micromachines, v.12, no.8
Publisher
MDPI AG
Abstract
© 2021 by the authors. Licensee MDPI, Basel, Switzerland.Although skin-like pressure sensors exhibit high sensitivity with a high performance over a wide area, they have limitations owing to the critical issue of being linear only in a narrow strain range. Various strategies have been proposed to improve the performance of soft pressure sensors, but such a nonlinearity issue still exists and the sensors are only effective within a very narrow strain range. Herein, we fabricated a highly sensitive multi-channel pressure sensor array by using a simple thermal evaporation process of conducting nanomembranes onto a stretchable substrate. A rigid-island structure capable of dissipating accumulated strain energy induced by external mechanical stimuli was adopted for the sensor. The performance of the sensor was precisely controlled by optimizing the thickness of the stretchable substrate and the number of serpentines of an Au membrane. The fabricated sensor exhibited a sensitivity of 0.675 kPa−1 in the broad pressure range of 2.3–50 kPa with linearity (~0.990), and good stability (>300 Cycles). Finally, we successfully demonstrated a mapping of pressure distribution.
URI
https://pr.ibs.re.kr/handle/8788114/10538
DOI
10.3390/mi12080933
ISSN
2072-666X
Appears in Collections:
Center for Neuroscience Imaging Research (뇌과학 이미징 연구단) > 1. Journal Papers (저널논문)
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