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Publication Date2020-03 Band alignment of BeO gate dielectric grown by atomic-layer deposition on AlGaN/GaN HEMTs
Lee S.M.; Jung D.H.; Yoon S., et al
APPLIED SURFACE SCIENCE, v.505, pp.144107
Publication Date2019-10 Crystal properties of atomic-layer deposited beryllium oxide on crystal and amorphous substrates
Lee S.M.; Jang Y.; Jung Hwan Yum, et al
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, v.34, no.11, pp.115021
Publication Date2020-01 Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition
Jang Y.; Lee S.M.; Jung D.H., et al
SOLID-STATE ELECTRONICS, v.163, pp.107661

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