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Large-Area Uniform 1-nm-Level Amorphous Carbon Layers from 3D Conformal Polymer Brushes. A "Next-Generation" Cu Diffusion Barrier?

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dc.contributor.authorKang, Yun-Ho-
dc.contributor.authorLee, Sangbong-
dc.contributor.authorChoi, Youngwoo-
dc.contributor.authorWon Kyung Seong-
dc.contributor.authorHan, Kyu Hyo-
dc.contributor.authorKim, Jang Hwan-
dc.contributor.authorKim, Hyun-Mi-
dc.contributor.authorHong, Seungbum-
dc.contributor.authorSun Hwa Lee-
dc.contributor.authorRodney S. Ruoff-
dc.contributor.authorKim, Ki-Bum-
dc.contributor.authorKim, Sang Ouk-
dc.date.accessioned2022-05-25T04:41:20Z-
dc.date.available2022-05-25T04:41:20Z-
dc.date.created2022-03-07-
dc.date.issued2022-04-
dc.identifier.issn0935-9648-
dc.identifier.urihttps://pr.ibs.re.kr/handle/8788114/11561-
dc.description.abstractA reliable method for preparing a conformal amorphous carbon (a-C) layer with a thickness of 1-nm-level, is tested as a possible Cu diffusion barrier layer for next-generation ultrahigh-density semiconductor device miniaturization. A polystyrene brush of uniform thickness is grafted onto 4-inch SiO2/Si wafer substrates with "self-limiting" chemistry favoring such a uniform layer. UV crosslinking and subsequent carbonization transforms this polymer film into an ultrathin a-C layer without pinholes or hillocks. The uniform coating of nonplanar regions or surfaces is also possible. The Cu diffusion "blocking ability" is evaluated by time-dependent dielectric breakdown (TDDB) tests using a metal-oxide-semiconductor (MOS) capacitor structure. A 0.82 nm-thick a-C barrier gives TDDB lifetimes 3.3x longer than that obtained using the conventional 1.0 nm-thick TaNx diffusion barrier. In addition, this exceptionally uniform ultrathin polymer and a-C film layers hold promise for selective ion permeable membranes, electrically and thermally insulating films in electronics, slits of angstrom-scale thickness, and, when appropriately functionalized, as a robust ultrathin coating with many other potential applications.-
dc.language영어-
dc.publisherWILEY-V C H VERLAG GMBH-
dc.titleLarge-Area Uniform 1-nm-Level Amorphous Carbon Layers from 3D Conformal Polymer Brushes. A "Next-Generation" Cu Diffusion Barrier?-
dc.typeArticle-
dc.type.rimsART-
dc.identifier.wosid000760899100001-
dc.identifier.scopusid2-s2.0-85125242588-
dc.identifier.rimsid77836-
dc.contributor.affiliatedAuthorWon Kyung Seong-
dc.contributor.affiliatedAuthorSun Hwa Lee-
dc.contributor.affiliatedAuthorRodney S. Ruoff-
dc.identifier.doi10.1002/adma.202110454-
dc.identifier.bibliographicCitationADVANCED MATERIALS, v.34, no.15-
dc.relation.isPartOfADVANCED MATERIALS-
dc.citation.titleADVANCED MATERIALS-
dc.citation.volume34-
dc.citation.number15-
dc.type.docTypeArticle-
dc.description.journalClass1-
dc.description.journalClass1-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaChemistry-
dc.relation.journalResearchAreaScience & Technology - Other Topics-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalResearchAreaPhysics-
dc.relation.journalWebOfScienceCategoryChemistry, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryChemistry, Physical-
dc.relation.journalWebOfScienceCategoryNanoscience & Nanotechnology-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalWebOfScienceCategoryPhysics, Condensed Matter-
dc.subject.keywordPlusDIRECT CARBONIZATION-
dc.subject.keywordPlusTHERMAL-STABILITY-
dc.subject.keywordPlusGRAPHENE-
dc.subject.keywordPlusFILMS-
dc.subject.keywordPlusTAN-
dc.subject.keywordPlusTEMPERATURE-
dc.subject.keywordPlusDEPOSITION-
dc.subject.keywordPlusOXIDATION-
dc.subject.keywordPlusMECHANISM-
dc.subject.keywordPlusDEPENDENT DIELECTRIC-BREAKDOWN-
dc.subject.keywordAuthoramorphous carbon-
dc.subject.keywordAuthorcarbonization-
dc.subject.keywordAuthorCu diffusion barrier-
dc.subject.keywordAuthorpolymer grafting-
Appears in Collections:
Center for Multidimensional Carbon Materials(다차원 탄소재료 연구단) > 1. Journal Papers (저널논문)
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