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Publication Date2018-11 Area-Selective Atomic Layer Deposition Using Si Precursors as Inhibitors
Rizwan Khan; Bonggeun Shong; Byeong Guk Ko, et al
CHEMISTRY OF MATERIALS, v.30, no.21, pp.7603 - 7610
Publication Date2020-01 Surface Energy Change of Atomic-Scale Metal Oxide Thin Films by Phase Transformation
Il-Kwon Oh; Li Zeng; Jae-Eun Kim, et al
ACS NANO, v.14, no.1, pp.676 - 687

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