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원자제어 저차원 전자계 연구단
원자제어 저차원 전자계 연구단
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Atomically thin three-dimensional membranes of van der Waals semiconductors by wafer-scale growth

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Title
Atomically thin three-dimensional membranes of van der Waals semiconductors by wafer-scale growth
Author(s)
Gangtae Jin; Chang-Soo Lee; Liao X.; Juho Kim; Wang Z.; Okello O.F.N.; Park B.; Jaehyun Park; Cheolhee Han; Heo H.; Kim J.; Oh S.H.; Choi S.-Y.; Park H.; Moon-Ho Jo
Publication Date
2019-07
Journal
SCIENCE ADVANCES, v.5, no.7, pp.eaaw3180 -
Publisher
AMER ASSOC ADVANCEMENT SCIENCE
Abstract
Copyright © 2019 The Authors,We report wafer-scale growth of atomically thin, three-dimensional (3D) van der Waals (vdW) semiconductor membranes. By controlling the growth kinetics in the near-equilibrium limit during metal-organic chemical vapor depositions of MoS2 and WS2 monolayer (ML) crystals, we have achieved conformal ML coverage on diverse 3D texture substrates, such as periodic arrays of nanoscale needles and trenches on quartz and SiO2/Si substrates. The ML semiconductor properties, such as channel resistivity and photoluminescence, are verified to be seamlessly uniform over the 3D textures and are scalable to wafer scale. In addition, we demonstrated that these 3D films can be easily delaminated from the growth substrates to form suspended 3D semiconductor membranes. Our work suggests that vdW ML semiconductor films can be useful platforms for patchable membrane electronics with atomic precision, yet large areas, on arbitrary substrates
URI
https://pr.ibs.re.kr/handle/8788114/6133
ISSN
2375-2548
Appears in Collections:
Center for Artificial Low Dimensional Electronic Systems(원자제어 저차원 전자계 연구단) > Journal Papers (저널논문)
Files in This Item:
2019Science Journals — AAAS_조문호(교신)_Atomically thin three-dimensional membranes of van der Waals semiconductors by wafer-scale growth.pdfDownload

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