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Low Temperature Measurement of the Electrical Conductivity in Amorphous InGaZnO Thin Films

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Title
Low Temperature Measurement of the Electrical Conductivity in Amorphous InGaZnO Thin Films
Author(s)
Hasung Sim; Seongil Choi; Je Geun Park; Jaewon Song; Seungwu Han; Cheol Seong Hwang; Deok-Yong Cho
Publication Date
2014-02
Journal
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, v.3, no.2, pp.P10 - P12
Publisher
Electrochemical Society
Abstract
We examine the temperature-dependent electrical conductivity in amorphous InGaZnO thin films with various cation compositions. In-rich films are metallic, while Ga-rich films are semiconducting with logarithmic conductivities linear to -T−1/4 above T = 60 K. The Zn-rich films are also semiconducting but have >102 times higher conductivity than the Ga-rich films. At T > 60 K, thermal electronic excitation dominantly contributes the conduction, while at T < 60 K, certain impurity scatterings or structural disorders have importance in the electrical properties in low carrier a-IGZO system.
URI
https://pr.ibs.re.kr/handle/8788114/1186
DOI
10.1149/2.003402jss
ISSN
2162-8769
Appears in Collections:
Center for Correlated Electron Systems(강상관계 물질 연구단) > 1. Journal Papers (저널논문)
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